The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2004
Filed:
Mar. 19, 2002
Gi-Chung Kwon, Gyeonggi-do, KR;
Hong-Sik Byun, Gyeonggi-do, KR;
Sung-Weon Lee, Gyeonggi-do, KR;
Hong-Seub Kim, Gyeonggi-do, KR;
Sun-Seok Han, Gyeonggi-do, KR;
Bu-Jin Ko, Daejon, KR;
Joung-Sik Kim, Choongchongnam-do, KR;
Jusung Engineering Co., Ltd., , KR;
Abstract
An impedance matching circuit for a plasma source includes: a first network including: a first coil; and a RF power supply applying a first voltage to the first coil; and a second network including; a second coil grounded having a second voltage, the second voltage being lower than the first voltage; first and second reactive elements, one end portion of the first and second reactive elements being connected to each end portion of the second coil, respectively; and a load connected to the other end portions of the first and second reactive elements, phases at two end portions of the load being different from each other.