Hon-Shung Lui

Title: Hon-Shung Lui: Innovator in Semiconductor Technology

Introduction

Hon-Shung Lui is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the development of advanced manufacturing processes. With a total of 2 patents, his work has had a notable impact on the industry.

Latest Patents

One of Hon-Shung Lui's latest patents is the Tungsten tunnel-free process. This innovative method describes an improved technique for forming a tunnel-free tungsten plug. The process involves providing semiconductor device structures in and on a semiconductor substrate. An insulating layer of borophospho-tetraethoxysilane (BP-TEOS) is deposited over the semiconductor device structures. Contact openings are then etched through the insulating layer to the underlying semiconductor device structures, creating a tunnel in the insulating layer between contact openings. The semiconductor substrate is covered with a first barrier metal layer, followed by a coating of a spin-on-glass layer that fills the contact openings and the tunnel. The spin-on-glass is anisotropically etched away, leaving it only within the tunnel. A second barrier metal layer is then applied, and the contact openings are filled with tungsten, which is etched back to form tungsten plugs. This process results in tunnel-free tungsten plugs, enhancing the fabrication of integrated circuit devices.

Career Highlights

Hon-Shung Lui is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His expertise and innovative approaches have contributed to the company's reputation for excellence in semiconductor manufacturing.

Collaborations

Throughout his career, Hon-Shung Lui has collaborated with notable colleagues, including Ming-Chih Chung and Shun-Hsiang Chen. These collaborations have further advanced the development of semiconductor technologies.

Conclusion

Hon-Shung Lui's contributions to semiconductor technology, particularly through his patented processes, demonstrate his commitment to innovation in the field. His work continues to influence the industry and pave the way for future advancements.