Holger Wagner

Title: Holger Wagner: Innovator in Photolithography and Direct Imaging

Introduction

Holger Wagner is a notable inventor based in Jena, Germany. He has made significant contributions to the fields of photolithography and direct imaging, holding a total of 4 patents. His work focuses on improving exposure control methods and imaging systems, which are crucial in the manufacturing of circuit boards and other electronic components.

Latest Patents

Wagner's latest patents include innovative technologies aimed at enhancing exposure control in photolithographic direct exposure methods. One of his inventions addresses a device for exposure control in photolithographic processes for two-dimensional structures in photosensitive coatings. This invention allows for improved registration of target marks, independent of their defined locations. The system utilizes a registration unit with multiple entocentric cameras arranged in a linear alignment, creating a gapless scanning area over the substrate. The overlapping regions of adjacent cameras enable redundant image captures, which are processed to accurately determine the position of target marks.

Another significant patent is a direct imaging system that comprises an illumination unit with multiple light sources. This system is designed to emit beams that are aligned in position or angle, utilizing an acoustic optical modulator to diffract different portions of the beams. The scanning element then scans an exposure plane with these modulated beams, ensuring that they unite into a single exposure spot at a selected scanning velocity.

Career Highlights

Throughout his career, Holger Wagner has worked with prominent companies in the industry, including Orbotech Limited and Laser Imaging Systems GmbH & Co. KG. His experience in these organizations has allowed him to develop and refine his innovative technologies, contributing to advancements in the field.

Collaborations

Wagner has collaborated with talented individuals such as Stefan Heinemann and Jonas Burghoff. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies in photolithography and imaging.

Conclusion

Holger Wagner's contributions to the fields of photolithography and direct imaging are noteworthy. His innovative patents and collaborations have significantly advanced the technology used in manufacturing electronic components. His work continues to influence the industry and inspire future innovations.