Hoe-sik Chung

Title: Innovations of Hoe-sik Chung in Semiconductor Technology

Introduction

Hoe-sik Chung is a prominent inventor based in Kyungki-do, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor devices through innovative compositions and methods.

Latest Patents

One of Hoe-sik Chung's latest patents is titled "Compositions for anti-reflective light absorbing layer and method for forming patterns in semiconductor device using the same." This invention involves a composition for an anti-reflective layer that can be developed simultaneously with a photoresist layer after exposure during the photolithography process. The composition includes a polymer with a (meth)acrylate repeating unit, a light-absorbing group of diazoquinones, a photoacid generator, a cross-linker, and a catalyst for the cross-linking reaction. The method for forming patterns in a semiconductor device utilizes this composition to create an anti-reflective layer on a semiconductor substrate, allowing for simultaneous exposure and development of both the anti-reflective layer and the photoresist layer.

Another notable patent is the "Semiconductor device fabrication system," which is designed for performing a UV-bake on a photoresist pattern during semiconductor device pattern formation. This system includes a photoresist coating unit, a developing unit, and a cross-linking and flow baking unit. The cross-linking and flow baking unit stabilizes the photoresist pattern thermally before the flow baking process.

Career Highlights

Hoe-sik Chung is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the semiconductor field. His work has been instrumental in advancing the technology used in semiconductor devices, contributing to the efficiency and performance of these essential components.

Collaborations

Throughout his career, Hoe-sik Chung has collaborated with notable colleagues, including Jin-hang Jung and Gyu-chan Jeoung. These collaborations have fostered a productive environment for innovation and development in semiconductor technology.

Conclusion

Hoe-sik Chung's contributions to semiconductor technology through his patents and work at Samsung Electronics Co., Ltd. highlight his role as a key innovator in the field. His inventions are paving the way for advancements in semiconductor device fabrication and efficiency.