Company Filing History:
Years Active: 1992-2006
Title: Inventor Profile: Hoa Thi Kieu
Introduction
Hoa Thi Kieu is an accomplished inventor based in Sunnyvale, California, with a total of 11 patents to her name. Her work primarily focuses on advancements in sputter deposition technology, which is critical in various applications within the semiconductor industry. Her innovative approaches have significantly contributed to improving the quality and efficiency of industrial processes.
Latest Patents
One of Kieu’s notable patents is aimed at reducing particle generation during sputter deposition. In this invention, a substrate is strategically placed in a magnetron sputtering chamber, where a deposition shield surrounds it. This shield has a uniquely textured surface, allowing sputtered residues to stick without flaking off. By applying electrical power to a high-density sputtering target and utilizing a rotating magnetic field, Kieu’s process can consistently produce substrates with an average particle count of less than one particle per 10 cm² over 8,000 cycles without requiring cleaning.
Another significant patent involves a method and apparatus for depositing dielectric films such as tantalum oxide. In this method, a substrate is subjected to a pulsed DC voltage applied to a metal target while a specifically composed sputtering gas is introduced. This process enables the controlled deposition of films with desired stoichiometric ratios, paving the way for complex applications in electronics.
Career Highlights
Hoa Thi Kieu is currently working at Applied Materials, Inc., a leading company in material engineering solutions. Her innovative contributions in vapor deposition technologies have set new benchmarks in the industry. Through her expertise and relentless pursuit of excellence, she continues to drive forward the capabilities of semiconductor manufacturing processes.
Collaborations
Kieu often collaborates with talented coworkers such as Zheng Xu and Hien-Minh Huu Le, contributing to a dynamic and innovative team at Applied Materials, Inc. These collaborations enhance the collective effort in researching and developing new technologies that meet the evolving demands of the industry.
Conclusion
With her series of patents and valuable contributions to the field of semiconductor technology, Hoa Thi Kieu exemplifies the spirit of innovation. Her ongoing work at Applied Materials, Inc. and her collaborations with esteemed colleagues underscore her importance in shaping the future of sputter deposition and dielectric film technology. As technology advances, Kieu is sure to remain at the forefront, continually pushing boundaries in her field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.