Location History:
- Machida, JP (1992)
- Hachioji, JP (2013 - 2014)
Company Filing History:
Years Active: 1992-2014
Title: Hisatsune Kadota: Innovator in Liquid Immersion Exposure Technology
Introduction
Hisatsune Kadota is a prominent inventor based in Hachioji, Japan. He has made significant contributions to the field of exposure apparatus technology, particularly in liquid immersion systems. With a total of 3 patents to his name, Kadota's work has been instrumental in advancing the capabilities of exposure devices used in various applications.
Latest Patents
Kadota's latest patents include innovative technologies such as an exposure apparatus, a method for producing devices, and a method for controlling exposure apparatus. One of his notable inventions is a liquid immersion exposure apparatus that features a movable member with a substrate holder and a surface positioned adjacent to it. This design allows for the effective supply and recovery of liquid in the immersion area, enhancing the precision of the exposure process. The controller integrated into the system is designed to halt the liquid supply upon detecting any abnormalities, thereby preventing potential leakage and ensuring the integrity of the exposure process.
Career Highlights
Hisatsune Kadota has dedicated his career to the development of advanced exposure technologies. His work at Nikon Corporation has positioned him as a key player in the field, where he has been able to apply his innovative ideas to practical applications. His patents reflect a deep understanding of the complexities involved in exposure systems and a commitment to improving their functionality.
Collaborations
Kadota has collaborated with notable colleagues such as Nobutaka Magome and Naoyuki Kobayashi. These partnerships have fostered an environment of innovation and have contributed to the successful development of cutting-edge technologies in the exposure apparatus domain.
Conclusion
Hisatsune Kadota's contributions to liquid immersion exposure technology have made a lasting impact on the industry. His innovative patents and collaborative efforts continue to drive advancements in exposure systems, showcasing his dedication to excellence in engineering and invention.