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North Andover, MA, United States of America

Hiroyuki Takahashi

USPTO Granted Patents = 9

EPO Patents = 1

Average Co-Inventor Count = 1.7

ph-index = 4

Forward Citations = 36(Granted Patents)

Location History:

North Andover, MA (US) (2008 - 2012)
Beverly, MA (US) (2012 - 2013)

Company Filing History:

9 out of 10,295

Tokyo Electron Limited

Years Active: 2008-2013

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9 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8383517 - Substrate processing method and substrate processing apparatus (2013-02-26),

2. 8323410 - High throughput chemical treatment system and method of operating (2012-12-04),

3. 8287688 - Substrate support for high throughput chemical treatment system (2012-10-16),

4. 8282844 - Method for etching metal nitride with high selectivity to other materials (2012-10-09),

5. 8198197 - Plasma etching method (2012-06-12),

6. 8012305 - Exhaust assembly for a plasma processing system (2011-09-06),

7. 7877161 - Method and system for performing a chemical oxide removal process (2011-01-25),

8. 7815814 - Method and system for dry etching a metal nitride (2010-10-19),

9. 7416677 - Exhaust assembly for plasma processing system and method (2008-08-26),

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