Koganei, Japan

Hiroyuki Shida


Average Co-Inventor Count = 8.2

ph-index = 3

Forward Citations = 55(Granted Patents)


Location History:

  • Koganei, JP (1998)
  • Hitachi, JP (2001)

Company Filing History:


Years Active: 1998-2001

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3 patents (USPTO):Explore Patents

Title: Hiroyuki Shida: Innovator in Gas Supply and Vacuum Processing Technologies

Introduction

Hiroyuki Shida is a prominent inventor based in Koganei, Japan. He has made significant contributions to the fields of gas supply and vacuum processing technologies. With a total of 3 patents to his name, Shida's work has had a notable impact on the industry.

Latest Patents

Shida's latest patents include a gas supply apparatus and a film forming apparatus. The gas supply apparatus features a signal transmission system arranged in a region surrounded by gas control means and multiple blocks. This innovative design allows for the utilization of space between elements constituting a gas supply flow path, thereby miniaturizing the apparatus. His second patent, a vacuum processing device and film forming device, relates to processing wafers in a vacuum. This invention incorporates radiation measurement and temperature control of the wafer using an infrared radiation thermometer, enabling precise heating and cooling during processing.

Career Highlights

Hiroyuki Shida is associated with Hitachi, Ltd., a leading company in technology and innovation. His work at Hitachi has allowed him to develop cutting-edge technologies that enhance the efficiency and effectiveness of gas supply and vacuum processing systems.

Collaborations

Shida has collaborated with notable coworkers, including Hideaki Shimamura and Yuji Yoneoka. Their combined expertise has contributed to the advancement of technologies in their respective fields.

Conclusion

Hiroyuki Shida's innovative contributions to gas supply and vacuum processing technologies demonstrate his commitment to advancing engineering solutions. His patents reflect a deep understanding of the complexities involved in these systems, making him a valuable asset to the field.

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