Average Co-Inventor Count = 8.18
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Hitachi, Ltd. (3 from 42,485 patents)
3 patents:
1. 6224676 - Gas supply apparatus and film forming apparatus
2. 5815396 - Vacuum processing device and film forming device and method using same
3. 5707500 - Vacuum processing equipment, film coating equipment and deposition method