Okazaki, Japan

Hiroshi Ohtsuki


Average Co-Inventor Count = 2.9

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:


Years Active: 2013-2014

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2 patents (USPTO):Explore Patents

Title: Hiroshi Ohtsuki: Innovator in Semiconductor Technology

Introduction

Hiroshi Ohtsuki is a prominent inventor based in Okazaki, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His innovative approaches have advanced the manufacturing processes of semiconductor substrates and devices.

Latest Patents

Ohtsuki's latest patents include a manufacturing method of a semiconductor substrate. This method involves forming a trench in a semiconductor board using a dry etching method. It also includes etching the surface portion of the inner wall of the trench by a chemical etching method to remove a first damage layer. The process ensures that the crystallinity of a second damage layer is recovered through heat treatment at temperatures equal to or higher than 1050°C in non-oxidizing and non-azotizing gas. This innovation significantly enhances the crystallinity around the trench.

Another notable patent is related to a silicon on insulator (SOI) structure semiconductor device. In this device, a lattice distortion layer is formed by implanting Ar ions into a silicon substrate. The lattice distortion layer serves as a gettering site, preventing leakage current while maintaining tensile stress within specified limits. This advancement is crucial for improving the performance and reliability of semiconductor devices.

Career Highlights

Throughout his career, Hiroshi Ohtsuki has worked with notable companies such as Denso Corporation and Shin-Etsu Handotai Co., Ltd. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.

Collaborations

Ohtsuki has collaborated with esteemed colleagues, including Takumi Shibata and Mitsutaka Katada. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Hiroshi Ohtsuki's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor manufacturing processes and device performance.

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