Average Co-Inventor Count = 1.8
ph-index = 5
Forward Citations = 194(Granted Patents)
Location History:
- Ohme, JP (1989)
- Yokohama, JP (1994)
- Tochigi-ken, JP (2001)
- Kawachi-gun, JP (2003)
Company Filing History:
Years Active: 1989-2003
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7 patents (USPTO):Explore Patents
1. 6607380 - Substrate conveying system and device manufacturing method using the same (2003-08-19),
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