The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 1989
Filed:
Dec. 24, 1987
Hiroshi Nakazato, Ohme, JP;
Mamoru Iijima, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A dust-tight container suitably usable in the manufacture of semiconductor microcircuits, for keeping therein a plate-like member such as a reticle, a photomask or a wafer is disclosed. The container has an elastomeric sealing member which is provided along an engaging portion between a container casing and a cover or door of the container, to achieve sufficiently complete dust-tight property of the container to thereby effectively prevent dust or foreign particles from entering into the container. At an engaging portion between the door and the container casing, a protrusion and a recess which mate at the time of closing of the door are provided. These mating protrusion and recess are formed at positions which are on the inner side of the elastomeric sealing member. This effectively prevents particles, adhered to the sealing member and scattering at the time of opening/closing of the door, from entering into the container.