Location History:
- Kudamatsu, JP (2018 - 2020)
- Tokyo, JP (2022)
Company Filing History:
2 out of 1,134 
1 out of 2,874 
Years Active: 2018-2022
Title: Hironori Kusumoto – Innovator in Plasma Processing Technology
Introduction
Hironori Kusumoto is an accomplished inventor based in Kudamatsu, Japan, with a focus on advancements in plasma processing technology. With a portfolio of three patents, Kusumoto has made significant contributions to the field, enhancing the precision and efficiency of plasma processing apparatuses.
Latest Patents
Kusumoto's recent patents include groundbreaking innovations aimed at improving temperature measurement and control in plasma processing. One of his notable inventions is a **plasma processing apparatus** designed with an additional viewing window situated between an infrared temperature sensor and an existing view window. This additional window is kept at room temperature (20°C to 25°C) to stabilize the electromagnetic waves emitted from the view window, thereby enhancing measurement precision and enabling stable control of the dielectric window temperature.
Another significant invention is the **plasma processing apparatus and sample stage thereof**, which involves processing a wafer positioned on a sample stage within a vacuum vessel. This apparatus features heaters strategically located in the sample stage, organized both radially and circumferentially. The circumferentially arranged heater portions, particularly in the radially outer zones, can be connected in series, allowing for precise adjustments in heat generation.
Career Highlights
Throughout his career, Hironori Kusumoto has worked with prominent companies, including Hitachi High-Tech Corporation and Hitachi High-Technologies Corporation. His tenure at these organizations has provided him with the platform to develop and refine his innovative ideas in plasma processing technologies.
Collaborations
Kusumoto has collaborated with esteemed colleagues like Yutaka Ohmoto and Kazunori Nakamoto. These partnerships have fostered a productive environment for innovation and have enabled the development of advanced technologies in the realm of plasma processing.
Conclusion
Hironori Kusumoto stands out as a remarkable inventor in the field of plasma processing technology. His contributions through his patents reflect a dedication to enhancing the operational precision of processing apparatuses, making an impact in the tech industry. As he continues his work, the innovations stemming from his expertise promise to advance the capabilities of plasma processing even further.