Company Filing History:
Years Active: 2007-2011
Title: Hiroki Amemiya: Innovating Plasma Processing in Nirasaki, JP
Introduction
Hiroki Amemiya, an accomplished inventor from Nirasaki, Japan, has made significant contributions to the field of plasma processing. With a total of five patents to his name, Amemiya specializes in developing advanced technologies that enhance manufacturing processes.
Latest Patents
Among his latest innovations, Amemiya has introduced a plasma processing method and a plasma processing apparatus. His patented method includes several critical steps, such as loading a substrate with a resist mask onto a lower electrode, supplying a processing gas into the processing chamber, and generating a magnetic field perpendicular to the electrodes. This innovation notably employs high-frequency power to form an electric field, which then converts the processing gas into plasma through magnetron discharge. The precision with which the electric power is controlled is crucial, falling within a range of 1200 W to 2000 W per surface area of the substrate. Furthermore, Amemiya has developed a method for forming micro lenses, which involves an etching treatment using various etching gases to achieve intricate lens shapes on a lens material layer.
Career Highlights
Hiroki Amemiya is currently employed at Tokyo Electron Limited, where he continues to push the boundaries of plasma technology. His work is integral to advancing processes that are essential in the semiconductor and electronics industries. Through relentless innovation, he has solidified his reputation as a notable inventor in the competitive landscape of tech development.
Collaborations
Throughout his career, Amemiya has collaborated with esteemed professionals in his field, including Akihiro Kikuchi and Akihito Toda. These partnerships have fostered a creative environment where cutting-edge ideas are exchanged, further refining their collective contributions to plasma processing technologies.
Conclusion
Hiroki Amemiya stands out as a prominent figure in the realm of plasma processing innovations. His five patents, including groundbreaking methods for processing and forming micro lenses, showcase his commitment to advancing technology. Working alongside talented colleagues at Tokyo Electron Limited, Amemiya continues to make meaningful strides that hold the potential to shape the future of manufacturing.