Location History:
- Albany, NY (US) (2015)
- Watervliet, NY (US) (2017)
Company Filing History:
Years Active: 2015-2017
Title: The Innovations of Hiroie Matsumoto: Pioneering Trends in Semiconductor Technology
Introduction: Hiroie Matsumoto is an esteemed inventor based in Watervliet, NY, known for his significant contributions to the semiconductor technology field. With three patents to his name, Matsumoto has displayed a remarkable ability to innovate processes that enhance the efficiency and effectiveness of electronic manufacturing.
Latest Patents: Among his latest achievements, Matsumoto has focused on advanced methodologies for trench and hole patterning using extreme ultraviolet (EUV) resists in conjunction with dual-frequency capacitively coupled plasma (CCP). One of his notable patents discloses a method for treating a substrate that involves the formation of a complex film stack containing an underlying layer and multiple coating layers. This innovative approach allows for precise removal of patterning layers, allowing portions of the underlying layer to be exposed after multiple cycles of deposition and removal.
Additionally, Matsumoto has contributed to the etching of antireflective coatings. His patented method includes selectively depositing a carbon-containing layer on non-masked portions of an antireflective coating, enabling efficient etching to expose the underlying organic layer without compromising the photoresist layer's thickness.
Career Highlights: Matsumoto's work is prominently associated with Tokyo Electron Limited, a leading company in semiconductor manufacturing equipment. His expertise in developing cutting-edge solutions has made a significant impact on the company's operations and advancements in technology.
Collaborations: Collaboration is a vital component of innovation, and Matsumoto has worked closely with talented colleagues such as Andrew W. Metz and Yannick Feurprier. Their shared insights and cooperation have contributed to the successful development of groundbreaking technologies.
Conclusion: Hiroie Matsumoto continues to exemplify dedication and ingenuity in the semiconductor industry. Through his innovative patents and collaborative efforts, he plays a crucial role in pushing the boundaries of technology, ensuring that the future of electronic manufacturing remains bright and promising.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.