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Hirohisa Oda

USPTO Granted Patents = 3

Average Co-Inventor Count = 2.9

ph-index = 3

Forward Citations = 72(Granted Patents)

Location History:

Utsunomiya, JP (2001 - 2002)
Ibaraki, JP (2006)

Company Filing History:

3 out of 90,697

Canon Kabushiki Kaisha

Years Active: 2001-2006

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7140321 - Plasma processing apparatus and method (2006-11-28),

2. 6497783 - Plasma processing apparatus provided with microwave applicator having annular waveguide and processing method (2002-12-24),

3. 6299691 - Method of and apparatus for processing a substrate under a reduced pressure (2001-10-09),

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