Location History:
- Tokyo-to, JP (2003)
- Tokyo, JP (2003 - 2005)
Company Filing History:
Years Active: 2003-2005
Title: Hiroaki Narushima: Innovator in Microlithography Technology
Introduction
Hiroaki Narushima is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of microlithography, particularly through his innovative patents. With a total of 3 patents, Narushima continues to push the boundaries of technology in his industry.
Latest Patents
One of Narushima's latest patents is a mask-holding apparatus for a light exposure apparatus and a related scanning-exposure method. This invention involves an exposure apparatus designed to expose a substrate with an image of a pattern formed on a mask. It includes an illumination system for illuminating the mask with exposure light and a projection optical system for projecting the illuminated pattern onto the substrate. The mask is securely supported on a movable mask stage, with a mask holder provided for support from below and a pressing member applying a prescribed force from above.
Another notable patent is the stage apparatus that includes non-containing gas bearings and a microlithography apparatus comprising the same. This invention focuses on holding an object, such as a substrate or reticle, in a microlithography system, especially in a vacuum environment. The stage apparatus allows for movement in X and Y directions and is mounted to an arm member with linear-motor movers that interact with corresponding stators. The design incorporates gas bearings for smooth movement and can include guide members and sliders driven by a combination of a linear motor and a gas cylinder.
Career Highlights
Hiroaki Narushima is currently employed at Nikon Corporation, a leading company in imaging and optical products. His work at Nikon has allowed him to develop cutting-edge technologies that enhance the capabilities of microlithography systems.
Collaborations
Narushima has collaborated with notable coworkers, including Toshihiko Tsuji and Yasuo Araki. Their combined expertise has contributed to the advancement of innovative solutions in the field.
Conclusion
Hiroaki Narushima is a key figure in the development of microlithography technology, with several patents that showcase his innovative spirit. His work at Nikon Corporation and collaborations with esteemed colleagues highlight his commitment to advancing the field.