Location History:
- Fukuoka, JP (2004 - 2007)
- Fukuoka-ken, JP (2014)
Company Filing History:
Years Active: 2004-2014
Title: The Innovations of Hiroaki Hori in Electrostatic Chuck Technology
Introduction
Hiroaki Hori, a prominent inventor based in Fukuoka, Japan, has made significant contributions to the field of electrostatic chuck technology. With three patents to his name, Hori's innovations stand at the intersection of engineering and material science. His work is primarily focused on enhancing the functionality and efficiency of electrostatic chucks, which play a vital role in substrate processing applications.
Latest Patents
Hori's most recent patents include designs for advanced electrostatic chucks that feature innovative architectures. One of his notable patents describes an electrostatic chuck that consists of a ceramic substrate with a ceramic dielectric body positioned on top. This design incorporates various elements such as an electrode located between the two bodies and a complex arrangement of protrusions and gas supply grooves on the dielectric body's surface. Hori has also developed an electrostatic chuck specifically for electrically insulative substrates. This invention includes a dielectric layer with multitudes of electrodes that create a gradient electric field, enabling better attraction and processing of insulative substrates.
Career Highlights
Throughout his career, Hiroaki Hori has worked with various companies, including Toto Ltd., where he honed his expertise in electrostatics and material applications. His inventions have not only contributed to his employers but also to the broader community engaged in substrate processing and semiconductor manufacturing.
Collaborations
Hori has partnered with other talented individuals in the field, including colleagues Tetsuo Kitabayashi and Takeshi Uchimura. Their collaboration has fostered a creative environment wherein innovative ideas can flourish, enabling advancements in technologies surrounding electrostatic chucks.
Conclusion
Hiroaki Hori's contributions to the world of inventions, particularly in the realm of electrostatic chucks, showcase the impact of innovative thinking in advancing technology. As an inventor with a clear vision, Hori continues to push the boundaries of engineering and materials science, making significant strides that benefit various industries reliant on advanced processing techniques.