Hien Minh Le

Title: Hien Minh Le: Innovator in Semiconductor Technology

Introduction

Hien Minh Le is a prominent inventor based in San Jose, California. He has made significant contributions to the field of semiconductor technology, particularly in the development of advanced materials for memory devices. With a total of three patents to his name, Le's work has had a substantial impact on the industry.

Latest Patents

One of Hien Minh Le's latest patents is focused on a CVD-based oxide-metal multi-structure for 3D NAND memory devices. This innovation relates to methods for forming a metal layer and an oxide layer on the metal layer. In one implementation, the metal layer is formed on a seed layer, which aids in nucleating the metal with a small grain size while maintaining conductivity. The metal layer can be created using plasma-enhanced chemical vapor deposition (PECVD), with nitrogen gas introduced into the processing chamber alongside precursor gases. Additionally, a barrier layer is formed on the metal layer to prevent oxidation during the oxide layer deposition process. Another notable patent involves deuterium-containing films, where films are modified to include deuterium in an inductive high-density plasma chamber. This design allows for tunability of the deuterium concentration uniformity across a substrate.

Career Highlights

Hien Minh Le is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has positioned him as a key player in the advancement of solid-state electronic devices.

Collaborations

Le has collaborated with notable colleagues, including Susmit Singha Roy and Kelvin Chan, contributing to various projects that enhance the capabilities of semiconductor technologies.

Conclusion

Hien Minh Le's innovative work in semiconductor technology, particularly in the development of advanced materials for memory devices, showcases his expertise and dedication to the field. His contributions continue to influence the industry and pave the way for future advancements.