Koshi, Japan

Hidetsugu Yano


Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 3(Granted Patents)


Location History:

  • Koshi, JP (2015)
  • Yamana, JP (2015)
  • Kumamoto, JP (2017)

Company Filing History:


Years Active: 2015-2017

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3 patents (USPTO):Explore Patents

Title: Innovations of Inventor Hidetsugu Yano

Introduction

Hidetsugu Yano, a notable inventor based in Koshi, Japan, has made significant contributions to the field of liquid processing technologies. Holding three patents, Yano's innovations focus on efficiency and precision in liquid processing applications, particularly for substrates in various industries.

Latest Patents

Among his latest patents, Yano has developed a "Liquid Processing Apparatus with Cleaning Jig." This invention provides a unique cleaning method that enables thorough cleaning of a cup and adjacent components. The cleaning liquid is supplied from above while the cleaning jig is rotated, allowing the liquid to scatter obliquely along an inclined surface, effectively cleaning the cups.

Additionally, Yano's "Liquid Processing Method" enhances the performance of substrate treatments. This method involves a dual-phase approach: first, a liquid processing application using a processing solution, followed by a rinse process with a colder rinse solution. An intermediate step is introduced to adjust the substrate's temperature, ensuring optimal conditions for both processes.

Career Highlights

Hidetsugu Yano is currently affiliated with Tokyo Electron Limited, a prominent company in the semiconductor and electronics industry. His work there revolves around advancing liquid processing technologies which are critical in the manufacturing of high-quality electronic components.

Collaborations

Yano's accomplishments have been bolstered by collaboration with talented coworkers, including Takao Inada and Naoyuki Okamura. Together, they contribute to the innovative environment at Tokyo Electron, working on projects that blend their expertise in developing cutting-edge technologies.

Conclusion

As an inventor, Hidetsugu Yano exemplifies the impact of innovative thinking in the liquid processing domain. His contributions, backed by a strong patent portfolio, showcase a commitment to advancing technology in the electronics sector, enabling more efficient manufacturing processes.

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