The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2015
Filed:
May. 13, 2011
Takao Inada, Hsin-chu, TW;
Naoyuki Okamura, Kumamoto, JP;
Hidetsugu Yano, Yamana, JP;
Yosuke Hachiya, Yamana, JP;
Takao Inada, Hsin-chu, TW;
Naoyuki Okamura, Kumamoto, JP;
Hidetsugu Yano, Yamana, JP;
Yosuke Hachiya, Yamana, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
There is provided a liquid processing method for performing a liquid process on a front surface of a substrate by using a processing solution and then performing a rinse process on the front surface of the substrate by using a rinse solution having a temperature lower than a temperature of the processing solution. The liquid processing method includes performing an intermediate process between the liquid process and the rinse process, for adjusting a temperature of the front surface of the substrate to a temperature higher than the temperature of the rinse solution and lower than the temperature of the processing solution.