Location History:
- Tokyo-To, JP (2003)
- Tsukuba, JP (2005)
Company Filing History:
Years Active: 2003-2005
Title: Hideto Goto: Pioneer in Semiconductor Technology
Introduction
Hideto Goto is a distinguished inventor based in Tsukuba, Japan, known for his contributions to semiconductor technology. With two patents to his name, Goto has made significant advancements in enhancing manufacturing processes for semiconductor devices.
Latest Patents
Goto's latest patents exemplify his innovative approach. The first patent focuses on a method of manufacturing semiconductor devices. This invention aims to suppress the rise of the dielectric constant of insulating films during the wiring process in semiconductor devices using a damascene method. Specifically, it simplifies the manufacturing process while employing a combined arrangement of a wash unit for particle removal and a processing unit that applies an organic substance to the metal layers, optimizing the formation of protective films.
His second notable patent introduces a method of forming a plated layer to a predetermined thickness. This method enhances the quality of the planarization process compared to conventional techniques. By immersing a processing object and an electrode plate in a solution containing metal ions, a forward current is applied to deposit metal on the object's surface. After excess plating, a backward current is utilized to uniformly remove surplus material, facilitating a refined plating process.
Career Highlights
Hideto Goto is currently associated with Tokyo Electron Limited, a prominent player in the semiconductor manufacturing sector. His expertise and innovative methods have made a considerable impact on the efficiency and quality of semiconductor fabrication.
Collaborations
Throughout his career, Goto has collaborated with notable colleagues such as Takayuki Niuya and Michihiro Ono, contributing to a rich exchange of ideas and advancements in the field of semiconductor technology.
Conclusion
Hideto Goto's work continues to push the boundaries of semiconductor manufacturing processes. With his inventive patents and valuable collaborations, Goto remains a significant figure in advancing technology and engineering within the semiconductor industry. His contributions not only enhance manufacturing efficiency but also set a foundation for future innovations in the field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.