Location History:
- Toyama, JP (2007)
- Tokyo, JP (1994 - 2011)
Company Filing History:
Years Active: 1994-2011
Title: Innovations of Hidehiro Yanagawa
Introduction
Hidehiro Yanagawa is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor processing equipment. With a total of 5 patents to his name, Yanagawa's work has had a considerable impact on the industry.
Latest Patents
Yanagawa's latest patents include innovative technologies that enhance semiconductor processing. One of his notable inventions is the "Dual loading port semiconductor processing equipment." This substrate processing equipment features two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is designed to hold a pod containing substrates, while the pod door openers allow access to the substrates inside.
Another significant patent is the "Semiconductor device producing apparatus and producing method of semiconductor device." This apparatus includes a carrier-holding stage for placing a carrier, along with multiple stages for holding boats that contain substrates. The design incorporates a boat transfer mechanism and a substrate transfer mechanism, all controlled by a sophisticated controller to ensure efficient processing.
Career Highlights
Throughout his career, Yanagawa has worked with notable companies such as Hitachi Kokusai Electric Inc. and Kokusai Electric Co., Ltd. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.
Collaborations
Yanagawa has collaborated with talented individuals in the field, including Tatsuhisa Matsunaga and Takanobu Nakashima. These collaborations have fostered a creative environment that has led to groundbreaking advancements in semiconductor processing.
Conclusion
Hidehiro Yanagawa's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the industry. His innovative solutions continue to shape the future of semiconductor processing equipment.