The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 1994
Filed:
Jan. 21, 1993
Hidehiro Yanagawa, Tokyo, JP;
Hiroyuki Nishiuchi, Tokyo, JP;
Masakazu Shimada, Tokyo, JP;
Mitsuhiro Hirano, Tokyo, JP;
Tomoshi Taniyama, Tokyo, JP;
Kazumi Nikaido, Tokyo, JP;
Yoshikazu Hisajima, Tokyo, JP;
Michio Sato, Tokyo, JP;
Kokusai Electric Co., Ltd., Hamamatsu, JP;
Abstract
A plurality of airtight chambers are connected through blocking means, which can communicate or shut off the chambers, and at least one of the airtight chambers is used as a processing chamber. One of the adjacent airtight chambers is replaced by a replacement gas, and the replacement gas is supplied to the other of the adjacent airtight chambers. When pressure difference or pressure in the two adjacent airtight chambers is below a predetermined value, the adjacent two airtight chambers are communicated, and pressure in the two airtight chambers is equalized.