Location History:
- Nirasaki, JP (2012 - 2013)
- Miyagi, JP (2018 - 2019)
Company Filing History:
Years Active: 2012-2019
Title: Innovations of Hideaki Yakushiji
Introduction
Hideaki Yakushiji is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing and vacuum technology. With a total of 4 patents to his name, Yakushiji continues to push the boundaries of innovation in his industry.
Latest Patents
One of his latest patents is a plasma processing method. This method includes a step of loading a substrate into a chamber where a plasma process is to be executed. It also involves applying a high frequency bias power that has a lower frequency than a high frequency excitation power for plasma excitation to a mounting table. Additionally, a DC voltage is applied to an electrostatic chuck configured to electrostatically attract the substrate mounted on the table. The application of the DC voltage occurs after the high frequency bias power is applied.
Another significant patent is an evacuation method and vacuum processing apparatus. This method is used for a vacuum processing apparatus that includes a vacuum processing chamber. The chamber is evacuated by an exhaust device for a predetermined period by opening a valve connecting the exhaust device with the chamber. The pressure in the chamber is then urged to increase by closing the valve and leaving it closed for a second predetermined period after evacuation. This process aims to reduce the pressure in the chamber to a range between 6.7 Pa and 13.3×10 Pa without freezing moisture.
Career Highlights
Yakushiji is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work focuses on advancing technologies that enhance the efficiency and effectiveness of plasma processing and vacuum systems.
Collaborations
He collaborates with talented coworkers, including Tsuyoshi Moriya and Jun Yamawaku, who contribute to his innovative projects and research endeavors.
Conclusion
Hideaki Yakushiji's contributions to plasma processing and vacuum technology highlight his role as a significant inventor in the field. His patents reflect a commitment to innovation and excellence in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.