The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Jun. 06, 2008
Applicants:
Jun Yamawaku, Nirasaki, JP;
Tsuyoshi Moriya, Nirasaki, JP;
Hideaki Yakushiji, Nirasaki, JP;
Kazumasa Abe, Hsin-chu, TW;
Inventors:
Jun Yamawaku, Nirasaki, JP;
Tsuyoshi Moriya, Nirasaki, JP;
Hideaki Yakushiji, Nirasaki, JP;
Kazumasa Abe, Hsin-chu, TW;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
F26B 5/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
An evacuation method which can reduce evacuation time without causing moisture-related problems. In a vacuum processing apparatus including a vacuum processing chamber, during the evacuation for the vacuum processing chamber, the pressure in the vacuum processing chamber is maintained at a pressure lower than or equal to the atmospheric pressure but higher than or equal to 6.7×10Pa (5 Torr).