Company Filing History:
Years Active: 2010-2018
Title: Heyun Yin: Innovator in Semiconductor Processing
Introduction
Heyun Yin is a prominent inventor based in Saugus, MA (US), known for his contributions to semiconductor processing technologies. With a total of 6 patents to his name, he has made significant advancements in methods that enhance the efficiency and effectiveness of etching processes in semiconductor manufacturing.
Latest Patents
One of Heyun Yin's latest patents is focused on "Sputter etch material selectivity." This patent discloses a method of etching a workpiece that comprises two or more materials. The method utilizes physical sputtering as the etching technique, where processing parameters are finely tuned to achieve a desired etch rate selectivity. The process involves determining the etch rate of each material based on various parameters, including ion species, ion energy, incidence angle, and temperature. By establishing the relationship between etch rate and these parameters, a set of values can be selected to achieve the desired selectivity.
Another notable patent is titled "Technique for processing a substrate having a non-planar surface." This invention describes a method for processing substrates with both horizontal and non-horizontal surfaces. During the ion implantation process, a film may be deposited on the surfaces, which can adversely affect the substrate's properties. To address this issue, a secondary process is performed to remove the film from the horizontal surfaces, which may involve etching or material modification techniques.
Career Highlights
Heyun Yin is currently employed at Varian Semiconductor Equipment Associates, Inc., where he continues to innovate and develop new technologies in the semiconductor field. His work has been instrumental in improving the precision and reliability of semiconductor manufacturing processes.
Collaborations
Throughout his career, Heyun has collaborated with notable colleagues, including George D Papasouliotis and Vikram Singh. These collaborations have contributed to the advancement of semiconductor technologies and have fostered a productive research environment.
Conclusion
In summary, Heyun Yin is a distinguished inventor whose work in semiconductor processing has led to significant advancements in the field. His innovative patents and contributions continue to shape the future of semiconductor manufacturing.