Heung L Park

Title: Heung L Park: Innovator in Electroless Plating and Semiconductor Fabrication

Introduction

Heung L Park is a notable inventor based in Wilsonville, OR (US). With a total of 4 patents to his name, he has made significant contributions to the fields of electroless plating and semiconductor fabrication. His innovative approaches have paved the way for advancements in the manufacturing of integrated circuits.

Latest Patents

Among his latest patents is the "Electroless Layer Plating Process and Apparatus." This invention focuses on depositing conductive materials on work pieces, such as partially fabricated integrated circuits, through a unique spin coating method. The process involves applying components of an electroless plating bath separately to create a very thin conductive layer, typically in the range of a few hundred angstroms. The components used include a reducing agent and a metal source.

Another significant patent is related to the "Fabrication of Semiconductor Interconnect Structure." This patent describes an etching process that selectively etches exposed metal surfaces of a substrate while forming a conductive capping layer over these surfaces. The process allows for controlled oxidation and etching, which reduces pitting and enhances the quality of the semiconductor structures.

Career Highlights

Heung L Park is currently employed at Novellus Systems Incorporated, where he continues to innovate in the field of semiconductor manufacturing. His work has been instrumental in developing processes that improve the efficiency and effectiveness of electroless plating and etching techniques.

Collaborations

Heung has collaborated with several talented individuals, including Timothy Patrick Cleary and Daniel A Koos. These collaborations have fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies in the semiconductor industry.

Conclusion

Heung L Park's contributions to electroless plating and semiconductor fabrication highlight his role as a leading inventor in the field. His patents reflect a commitment to advancing technology and improving manufacturing processes.