Herng Yau Yoong

Title: **Innovative Contributions of Herng Yau Yoong in Extreme Ultraviolet Mask Technology**

Introduction

Herng Yau Yoong is a prominent inventor based in Singapore, known for his significant contributions to the field of extreme ultraviolet (EUV) technology. With a total of five patents to his name, he has played a crucial role in advancing the manufacturing processes for EUV mask blanks, which are essential in modern semiconductor lithography.

Latest Patents

Among his recent innovations, Yoong has developed multilayer extreme ultraviolet reflectors and EUV mask blanks. His patents detail methods of forming these mask blanks, which consist of a multilayer reflective stack on a substrate. The stack includes a trilayer film comprised of a first film, a second film, and a third film. These EUV mask blanks are engineered to exhibit low roughness and high reflectance across a broad range of reflection angles, effectively minimizing the M3D effect, particularly in high-NA EUV scanners. His work also describes production systems and techniques aimed at reducing surface roughness in the multilayer stacks.

Career Highlights

Yoong is currently associated with Applied Materials, Inc., a leading company in materials engineering solutions. Throughout his career, he has been dedicated to pushing the boundaries of EUV technology, ensuring that advancements in semiconductor manufacturing keep pace with the rapid demands of modern electronics.

Collaborations

In his professional journey, Yoong has collaborated with talented individuals such as Wen Xiao and Vibhu Jindal. Together, they have contributed to the innovative solutions arising in the EUV sector, enhancing the efficiency and performance of lithographic processes.

Conclusion

Herng Yau Yoong's expertise in developing advanced EUV mask technology positions him as a key figure in the semiconductor industry. His five patents reflect his innovative spirit and commitment to excellence in engineering, making him an essential asset to Applied Materials and a notable inventor in Singapore's technological landscape.