Henry C Lee

Title: The Innovative Contributions of Henry C. Lee

Introduction

Henry C. Lee is a prominent inventor based in San Francisco, CA. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work has advanced the methods used in the fabrication of semiconductor devices, showcasing his expertise and innovative spirit.

Latest Patents

Among his latest patents, one notable invention is a method for the fabrication of a semiconductor device. This method involves forming a semiconductor structure on an active area mesa while minimizing the loss of field oxide deposited in isolation trenches adjacent to the mesa. The trench insulating material is safeguarded by an etch barrier layer that exhibits at least partial resistance to the etchants used in subsequent device processing steps. This barrier layer can also be deposited over the substrate's surface to protect it from damage during processing. Once the barrier layer is removed using an etchant selective to it over the surrounding device elements, the final processing of the device can be completed.

Another significant patent involves the removal of an inorganic antireflective coating from a semiconductor substrate. This method includes forming a sacrificial layer over the substrate, which is selectively removable and compatible with photolithography. An inorganic antireflective coating, such as SiON, is then applied over the sacrificial layer. After the sacrificial layer is removed, the coating is lifted off the substrate. This method also includes forming a patterned layer of photoresist material over the antireflective coating, allowing for the definition of integrated circuit (IC) features.

Career Highlights

Henry C. Lee is currently employed at VLSI Technology, Inc., where he continues to innovate and contribute to the semiconductor industry. His work has been instrumental in developing advanced techniques that enhance the efficiency and effectiveness of semiconductor devices.

Collaborations

Throughout his career, Henry has collaborated with notable colleagues, including Xi-Wei Lin and Ian Robert Harvey. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Henry C. Lee's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative methods continue to shape the future of semiconductor fabrication, making a lasting impact on the industry.