Altdorf, Germany

Helmut Engelke


Average Co-Inventor Count = 3.2

ph-index = 7

Forward Citations = 134(Granted Patents)


Company Filing History:


Years Active: 1982-1992

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8 patents (USPTO):Explore Patents

Title: The Innovative Mind of Helmut Engelke

Introduction

Helmut Engelke, an accomplished inventor based in Altdorf, Germany, has made significant contributions to the field of particle beam technologies. With a portfolio of eight patents, Engelke's innovations focus primarily on methods for creating and utilizing particle beam masks for advanced imaging processes.

Latest Patents

Engelke's recent work includes cutting-edge patents that address complex challenges in pattern fabrication. One notable patent describes a method for the fabrication of particle beam masks. This innovative process automatically splits a layout of a hole pattern into two complementary arrangements for various particle beams, such as x-ray, electron, and ion beams. By determining all inside and outside corners of the pattern, the method establishes a stability value, allowing for division into stable sections that can be evenly distributed across two masks.

Another recent patent outlines a method of transferring a pattern into a radiation-sensitive layer. In this method, two partial patterns are used, which, when aligned correctly, yield the desired final pattern. This approach allows for overlapping elements of the partial patterns, utilizing radiation exposure to achieve precise design specifications. The method is particularly useful for transferring complex patterns requiring multiple masks, especially when annular elements are involved.

Career Highlights

Engelke is currently affiliated with the International Business Machines Corporation, widely known as IBM. His tenure at IBM has been marked by groundbreaking research and development in particle beam technologies, enhancing the performance and efficiency of imaging techniques utilized in various industries.

Collaborations

Throughout his career, Engelke has had the privilege of collaborating with renowned professionals in his field, including Harald Bohlen and Johann Greschner. These partnerships have fostered a creative environment that has led to advancements in the design and application of particle beam masks.

Conclusion

Helmut Engelke's innovative spirit and dedication to his craft have positioned him as a notable figure in the realm of particle beam technology. His patents not only demonstrate his technical expertise but also contribute significantly to ongoing advancements in imaging methods. As Engelke continues to create and collaborate, his work promises to influence future developments in the field.

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