The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 1992
Filed:
Dec. 11, 1990
Applicant:
Inventor:
Helmut Engelke, Altdorf, DE;
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F / ; H01J / ;
U.S. Cl.
CPC ...
364491 ; 364490 ; 364489 ; 364488 ; 2504923 ;
Abstract
A method for automatically splitting a layout of a hole pattern into two complementary arrangements for x-ray, electron beam, ion beams, i.e., particle beam masks. The method determines all inside and outside corners of said pattern and determining a stability value for the pattern so the pattern can be divided into stable sections and alternately distributed over two complementary masks.