Helene Prigge

Title: Helene Prigge: Innovator in Semiconductor Technology

Introduction

Helene Prigge is a distinguished inventor based in Unterschleissheim, Germany. She has made significant contributions to the field of semiconductor technology, holding a total of eight patents. Her innovative approaches have advanced the processes involved in treating polishing cloths and semiconductor slices.

Latest Patents

One of her latest patents is a process for treating polishing cloths used for semiconductor wafers. In the chemo-mechanical polishing of semiconductor wafers, the abrasion and geometrical quality of the wafers decrease with the increasing service life of the polishing cloth. This decline can be mitigated by treating the polishing cloth after each polishing operation. The treatment involves impressing a pressure field on the polishing cloth, which allows a treatment liquid to flow through its interior, rendering the residues produced during polishing mobile and facilitating their removal. A baseplate placed transversely across the polishing cloth, equipped with exit openings for the treatment liquid, is suitable for executing this process.

Another notable patent is for the surface treatment of semiconductor slices. This process enables the formation of gettering centers, which include stacking faults and dislocation networks during subsequent thermal treatment steps. By exerting pressure loading through an elastic pressure transmission medium, local pressure inhomogeneities are created without necessitating material erosion. This treatment is ideally conducted during a template polishing step, resulting in semiconductor slices with high surface quality on both sides.

Career Highlights

Helene Prigge has worked with reputable companies such as Wacker Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH and Wacker Chemitronic Gesellschaft. Her work in these organizations has allowed her to refine her expertise in semiconductor technology and contribute to innovative solutions in the industry.

Collaborations

Throughout her career, Helene has collaborated with notable colleagues, including Gerhard Brehm and Robert Rurlander. These partnerships have fostered a collaborative environment that has led to significant advancements in their field.

Conclusion

Helene Prigge's contributions to semiconductor technology through her patents and collaborations highlight her role as a leading innovator in the industry. Her work continues to influence the development of advanced semiconductor processes, showcasing her commitment to innovation and excellence.