Location History:
- Milpitas, CA (US) (2018 - 2019)
- Fremont, CA (US) (2020 - 2023)
Company Filing History:
Years Active: 2018-2023
Title: The Innovative Contributions of Helen Heng Liu
Introduction
Helen Heng Liu is a prominent inventor based in Fremont, CA. She has made significant contributions to the field of measurement and defect classification through her innovative patents. With a total of 5 patents, Liu has established herself as a key figure in her area of expertise.
Latest Patents
One of her latest patents is titled "Detection aided two-stage phase unwrapping on pattern wafer geometry measurement." This patent discloses systems and methods for unwrapping a phase map associated with an interferometric measurement of a sample that includes patterned features. The process involves receiving a wrapped phase map, removing a tilt, generating a background, detecting features, and applying both global and local phase-unwrapping techniques to produce an output unwrapped phase map.
Another notable patent is "Multi-wavelength interferometry for defect classification." This inspection system includes a controller connected to a differential interference contrast imaging tool. The system generates images based on illumination with two sheared illumination beams. It determines defect-induced phase shifts and classifies defects as either metal or non-metal based on comparative analysis.
Career Highlights
Helen Heng Liu has worked with notable companies such as Kla Tencor Corporation and Kla Corporation. Her experience in these organizations has allowed her to develop and refine her innovative ideas, contributing to advancements in measurement technologies.
Collaborations
Throughout her career, Liu has collaborated with talented individuals, including Andrew Zeng and Rohit Patnaik. These collaborations have fostered an environment of innovation and creativity, leading to the development of her impactful patents.
Conclusion
Helen Heng Liu's contributions to the field of measurement and defect classification are noteworthy. Her innovative patents and collaborations highlight her dedication to advancing technology. Liu continues to inspire future inventors with her work and achievements.