Location History:
- Miyagi-ken, JP (2000 - 2007)
- Hiyagi-ken, JP (2012)
Company Filing History:
1 out of 10,341 
1 out of 32 
4 out of 832,880 Years Active: 2000-2012
Title: Haruyuki Takano: Innovator in Plasma Technology
Introduction
Haruyuki Takano is a prominent inventor based in Hiyagi-ken, Japan. He has made significant contributions to the field of plasma technology, holding a total of 5 patents. His innovative work focuses on enhancing the efficiency and effectiveness of plasma devices.
Latest Patents
One of Takano's latest patents is a plasma etching device. This device features an auxiliary electrode that enables a uniform plasma density on the surface of a base. It allows for uniform etching without depending on pressure or the need to rotate magnetic field applying means. The design includes two parallel plate electrodes and RF power applying means, with the base positioned on one of the electrodes. An auxiliary electrode is strategically placed on the upstream side of the base in the flow of electron current generated by the magnetic field.
Another notable patent is a plasma method with high input power. This device consists of a container, a gas supply system, and an exhaust system. The container is made of a first dielectric plate that can transmit microwaves. An antenna for radiating microwaves is located outside the container, while an electrode for holding the object to be treated is situated inside. The design ensures that the microwave radiating surface of the antenna and the surface of the object are parallel and opposite to each other, optimizing the treatment process.
Career Highlights
Throughout his career, Haruyuki Takano has worked with notable companies, including Tokyo Electron Limited. His expertise in plasma technology has positioned him as a key figure in the industry, contributing to advancements that benefit various applications.
Collaborations
Takano has collaborated with esteemed colleagues such as Masaki Hirayama and Tadahiro Ohmi. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Haruyuki Takano's contributions to plasma technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the field, paving the way for future advancements in plasma applications.