Tokyo, Japan

Haruyoshi Yamakawa

This inventor holds 5 USPTO granted patents and 6 published patent applications and 1 EPO patent. Top assignee: Kurita Water Industries Ltd.. Active years: 2017-2018.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Haruyoshi Yamakawa. Retrieved from https://idiyas.com/inventor/haruyoshi-yamakawa

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 5 

% Patents Active = 20.0

 

Average Co-Inventor Count = 2.0

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:


Years Active: 2017-2018

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5 patents (USPTO):Explore Patents

Title: Haruyoshi Yamakawa: Innovator in Semiconductor Cleaning Technologies

Introduction

Haruyoshi Yamakawa is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor cleaning technologies, holding a total of five patents. His innovative approaches have advanced the methods used in the cleaning of semiconductor substrates, which are crucial for the electronics industry.

Latest Patents

Yamakawa's latest patents include a method for measuring the overall concentration of oxidizing substances, a substrate cleaning method, and a substrate cleaning system. The method for measuring oxidizing substances allows for online monitoring of the concentration in electrolyzed sulfuric acid. This is achieved by preparing absorbance data that has undergone baseline correction using a standard sample liquid. The absorbance is measured over a range of wavelengths to determine the overall concentration of oxidizing substances effectively.

The substrate cleaning method involves producing persulphuric acid through electrolysis and mixing it with a halide solution to create a cleaning solution. This solution is then heated and used to clean semiconductor substrates, ensuring high efficiency and effectiveness in the cleaning process.

Career Highlights

Yamakawa is currently employed at Kurita Water Industries Ltd., where he continues to develop innovative solutions for water treatment and semiconductor cleaning. His work has been instrumental in enhancing the performance and reliability of cleaning systems used in the semiconductor industry.

Collaborations

Throughout his career, Yamakawa has collaborated with notable colleagues, including Yuichi Ogawa and Tatsuo Nagai. These collaborations have fostered a productive environment for innovation and have contributed to the advancement of cleaning technologies.

Conclusion

Haruyoshi Yamakawa's contributions to semiconductor cleaning technologies highlight his role as a leading inventor in this field. His innovative patents and collaborative efforts continue to shape the future of semiconductor manufacturing processes.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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