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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10056248 B1

PDFFull Text
Expired
Date of Patent:
Aug. 21, 2018

Filed:

Jun. 23, 2014

Method for measuring overall concentration of oxidizing substances, substrate cleaning method, and substrate cleaning system

Applicant:

Kurita Water Industries Ltd., Nakano-ku, Tokyo, JP;

Inventor:

Haruyoshi Yamakawa, Tokyo, JP;

Assignee:

KURITA WATER INDUSTRIES LTD., Tokyo, JP;

Attorney:

Holtz, Holtz & Volek PC

Primary Examiner:

Xiaoyun R Xu

Int. Cl.
CPC ...
G01N 21/00 (2006.01); H01L 21/02 (2006.01); G01N 21/33 (2006.01); B08B 3/04 (2006.01); C25B 1/30 (2006.01); C25B 9/00 (2006.01); C25B 15/02 (2006.01); C25B 15/08 (2006.01); G01N 21/25 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01); G01N 21/27 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02057 (2013.01); B08B 3/04 (2013.01); C25B 1/30 (2013.01); C25B 9/00 (2013.01); C25B 15/02 (2013.01); C25B 15/08 (2013.01); G01N 21/255 (2013.01); G01N 21/274 (2013.01); G01N 21/33 (2013.01); H01L 21/6704 (2013.01); H01L 21/67017 (2013.01); H01L 21/67253 (2013.01); H01L 22/10 (2013.01); G01N 2201/127 (2013.01);
Abstract

To allow online monitoring of the overall concentration of oxidizing substances in electrolyzed sulfuric acid, for example, in a cleaning system, absorbance data having undergone baseline correction in relation to the overall concentration of oxidizing substances by using a standard sample liquid in the form of an electrolyzed sulfuric acid preparation liquid having the same sulfuric acid concentration as the sulfuric acid concentration of the electrolyzed sulfuric acid is prepared, and absorbance is measured over wavelengths ranging from 190 to 290 nm by using a sample liquid in the form of electrolyzed sulfuric acid having a sulfuric acid concentration ranging from 60 to 97% by mass and a liquid temperature ranging from 20 to 70° C. to measure the overall concentration of oxidizing substances in the electrolyzed sulfuric acid on the basis of the data. The overall concentration of oxidizing substances in the electrolyzed sulfuric acid can thus be immediately measured.

Find Patent Forward Citations

Yamakawa, Haruyoshi. (2018). Method for measuring overall concentration of oxidizing substances, substrate cleaning method, and substrate cleaning system (U.S. Patent No. 10056248). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10056248

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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