This inventor holds 1 USPTO granted patent. Top assignees: Globalfoundries Singapore Pte. Ltd., Infineon Technologies Ag, International Business Machines Corporation. Active years: 2011.
Company Filing History:


Years Active: 2011
Title: Han Wah Ng: Innovator in Semiconductor Technology
Introduction
Han Wah Ng is a notable inventor based in Johor, Malaysia. He has made significant contributions to the field of semiconductor technology, particularly in the area of interconnect manufacturing. His innovative approach has led to the development of a patented method that enhances the performance of copper interconnections.
Latest Patents
Han Wah Ng holds a patent titled "Method of controlled low-k via etch for Cu interconnections." This invention involves an interconnect stack and a method of manufacturing it, wherein the interconnect features vertical sidewall vias. The stack comprises a substrate, a metal interconnect formed within the substrate, an etch stop on the substrate and metal interconnect, and an interlayer dielectric (ILD) layer with at least one via extending through a transition layer on the etch stop layer. The method includes etching the ILD to a specific depth and ashing the interconnect stack to modify a portion of the ILD, converting it to an oxide material. This process allows for the formation of a via that extends through the ILD to the etch stop layer.
Career Highlights
Throughout his career, Han Wah Ng has worked with prominent companies in the semiconductor industry. He has been associated with Globalfoundries Singapore Pte. Ltd. and IBM, where he has contributed to various projects that advance semiconductor technology. His expertise in manufacturing processes has been instrumental in improving interconnect designs.
Collaborations
Han Wah Ng has collaborated with several professionals in his field, including Wuping Liu and Johnny Widodo. These collaborations have fostered innovation and have led to advancements in semiconductor manufacturing techniques.
Conclusion
Han Wah Ng's contributions to semiconductor technology through his patented methods and collaborations with industry professionals highlight his role as an influential inventor. His work continues to impact the field, paving the way for future innovations in interconnect manufacturing.