Han-Hum Park

Title: Innovator Spotlight: Han-Hum Park

Introduction: Han-Hum Park is an accomplished inventor based in Suwon-si, South Korea, recognized for his contributions in the field of semiconductor technology. With a total of two patents to his name, Park has made significant strides in enhancing the efficiency and accuracy of semiconductor fabrication processes.

Latest Patents: Among his latest patents is a "Method and apparatus for fabricating semiconductor devices." This innovative method involves obtaining initial raw data by measuring overlay on a semiconductor wafer of a first lot, followed by the generation of a regression equation that serves to align a semiconductor wafer from a second lot based on the coefficient of the regression equation. This process is further refined through a correction phase, which involves dividing the regression equation into an initial equation and a residual equation, allowing for more precision in semiconductor manufacturing.

Another notable patent is the "Method of calibrating target values and processing systems configured to calibrate the target values." This processing method focuses on measuring errors across various areas of a wafer, calculating error similarities, and generating estimated data based on these calculated errors. This approach ensures that semiconductor manufacturing processes are optimized for enhanced performance and reliability.

Career Highlights: Han-Hum Park is employed at Samsung Electronics Co., Ltd., a leading technology company known for its innovative products and solutions in the semiconductor industry. His work at Samsung has positioned him as a key figure in developing cutting-edge technologies and solutions.

Collaborations: Throughout his career, Han-Hum Park has collaborated with talented coworkers such as Chang-Ho Han and Sung-won Choi. Together, they contribute to the advancements in semiconductor technology and work towards overcoming challenges within the industry.

Conclusion: Han-Hum Park exemplifies the spirit of innovation and dedication in the semiconductor sector. With his patented methods and continuous collaboration with fellow experts, he is paving the way for future advancements in semiconductor fabrication, strengthening the foundation for next-generation technologies.