The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2017
Filed:
Oct. 30, 2013
Method of calibrating target values and processing systems configured to calibrate the target values
Chang-ho Han, Hwaseong-si, KR;
Dae-wook Kim, Hwaseong-si, KR;
Jin-young Lee, Yongin-si, KR;
Sung-won Choi, Yongin-si, KR;
Byoung-hoon Kim, Seongnam-si, KR;
Han-hum Park, Suwon-si, KR;
Sang-jin Choi, Incheon, KR;
Ja-hum Ku, Seoul, KR;
Chang-Ho Han, Hwaseong-si, KR;
Dae-Wook Kim, Hwaseong-si, KR;
Jin-Young Lee, Yongin-si, KR;
Sung-Won Choi, Yongin-si, KR;
Byoung-Hoon Kim, Seongnam-si, KR;
Han-Hum Park, Suwon-si, KR;
Sang-Jin Choi, Incheon, KR;
Ja-Hum Ku, Seoul, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;
Abstract
A processing method includes processing a wafer based on initial data, measuring errors for each of the plurality of areas, calculating an error similarity of at least some of the plurality of areas as a function of a separation distance between each pair of some of the areas, selecting a first area and a plurality of second areas adjacent to the first area, calculating weight values for the second areas based on the error similarities between each pair of second areas and the error similarities between the first area and each second area, calculating an estimated error of the first area based on the measured errors of the second areas and the weight values for the second areas, and generating estimated data based on the estimated errors for each of the plurality of areas.