Location History:
- Fuchu, JP (1997 - 1999)
- Tokyo, JP (1997 - 2002)
Company Filing History:
Years Active: 1997-2002
Title: Hajime Sahase: Innovator in Ionization Sputtering Technology
Introduction
Hajime Sahase is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of sputtering technology, holding a total of 4 patents. His work focuses on enhancing the efficiency and effectiveness of ionization sputtering apparatuses.
Latest Patents
One of his latest inventions is the Ionization Sputtering Apparatus. This invention discloses apparatuses that have a function for ionizing sputtered particles. These apparatuses comprise an ionization means for ionizing sputtered particles from a target. The ionization means generates a plasma by applying radio frequency energy with plasma generation gas at an ionization space between the target and a holder holding a substrate. Additionally, the disclosed apparatus includes a magnetic device that prevents the plasma from diffusing from the ionization space. Another notable invention is a Sputtering Apparatus, which is equipped with a magnetic assembly that is rotated and revolved. The eccentric distance between the rotation axis and the revolution axis is varied, resulting in a uniform erosion profile of a target and allowing for a consistent thin film deposition on a substrate surface.
Career Highlights
Hajime Sahase is currently employed at Anelva Corporation, where he continues to innovate in the field of sputtering technology. His work has been instrumental in advancing the capabilities of sputtering apparatuses, making them more efficient and effective for various applications.
Collaborations
Throughout his career, Hajime has collaborated with notable colleagues, including Nobuyuki Takahashi and Shigeru Mizuno. These collaborations have contributed to the development of cutting-edge technologies in the field.
Conclusion
Hajime Sahase is a distinguished inventor whose work in ionization sputtering technology has led to significant advancements in the field. His contributions continue to influence the industry and pave the way for future innovations.