Haixing Zou

Title: Haixing Zou: Innovator in Measurement Systems

Introduction

Haixing Zou is a prominent inventor based in Sunnyvale, CA, known for his contributions to measurement systems and illumination subsystems. With a total of 3 patents, he has made significant advancements in the field of optical measurements.

Latest Patents

Zou's latest patents focus on measurement systems configured to perform measurements of a specimen and illumination subsystems designed to provide illumination for these measurement systems. One notable patent describes an illumination subsystem that includes first and second light sources, which generate light for measurements across different wavelength regimes. The subsystem features a TIR prism that can be moved into and out of the optical path from the light sources to the measurement system. When the TIR prism is out of the optical path, light from only the first light source is directed along the optical path. Conversely, when the prism is positioned in the optical path, light from the second light source is directed along the optical path. This innovative approach allows for measurements using light in various wavelength regimes, including vacuum ultraviolet, ultraviolet, visible, and near-infrared.

Career Highlights

Haixing Zou is currently employed at KLA-Tencor Technologies Corporation, where he continues to develop cutting-edge technologies in measurement systems. His work has significantly impacted the field, enhancing the capabilities of optical measurements.

Collaborations

Zou has collaborated with notable colleagues, including Hidong Kwak and Shankar Krishnan, contributing to various projects that push the boundaries of measurement technology.

Conclusion

Haixing Zou's innovative work in measurement systems and illumination subsystems showcases his expertise and dedication to advancing optical measurement technologies. His contributions continue to influence the industry and inspire future innovations.