This inventor holds 3 USPTO granted patents and 1 published patent application. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2019-2023.
Company Filing History:
Years Active: 2019-2023
Title: Innovations of Hai-Yin Chen in Lithographic Technology
Introduction
Hai-Yin Chen is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of lithographic technology, particularly in the semiconductor industry. With a total of 3 patents to his name, Chen's work focuses on enhancing the efficiency and precision of wafer identification and alignment marking processes.
Latest Patents
Chen's latest patents include an "Apparatus for lithographically forming wafer identification marks and alignment marks." This invention relates to a lithographic substrate marking tool that utilizes a first electromagnetic radiation source to generate a specific type of electromagnetic radiation. The tool is designed to provide this radiation to a photosensitive material over a substrate, improving the marking process.
Another significant patent is the "Lithography engraving machine for forming water identification marks and alignment marks." This invention features a lithographic substrate marking tool that includes a first lithographic exposure tool within a shared housing. It is configured to generate electromagnetic radiation during multiple exposures, allowing for the efficient formation of substrate identification marks using a mobile reticle.
Career Highlights
Hai-Yin Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this prestigious company has allowed him to develop innovative solutions that address the challenges faced in lithographic processes.
Collaborations
Throughout his career, Chen has collaborated with esteemed colleagues such as Hu-Wei Lin and Chih-Hsien Hsu. These collaborations have further enriched his research and development efforts, leading to advancements in lithographic technology.
Conclusion
Hai-Yin Chen's contributions to lithographic technology have made a significant impact on the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in this critical field.