Company Filing History:
Years Active: 2005-2011
Title: **Innovations by Hai Deng: Pioneering Advances in Photoresist Technology**
Introduction
Hai Deng, an accomplished inventor based in Mountain View, CA, has made significant contributions to the field of semiconductor technology. With a total of six patents to his name, Deng has focused on innovations that enhance manufacturing processes and materials used in the creation of advanced electronic devices.
Latest Patents
Deng's recent patents include groundbreaking methods and compositions for reducing line width roughness. This invention involves a non-chemically amplified photoresist that results in improved line width roughness (LWR), crucial for the fabrication of smaller and more efficient electronic components. One notable embodiment specifies a developer-soluble resin (DSR) combined with a photoactive compound (PAC). The uniform distribution of the PAC within the DSR lowers acid diffusion, resulting in an impressive reduction of LWR to less than 1.5 nm, facilitating the effective manufacture of devices with feature sizes of approximately 15 nm.
Another significant patent pertains to the development of a zeolite-sol gel nanocomposite low-k dielectric material. This method entails creating a liquid sol-zeolite colloid by dispersing zeolite particles in a sol, which can then be deposited onto an underlying layer. The resulting structure can be transformed into either a wet gel or an aerogel before undergoing calcination to stabilize the composite material.
Career Highlights
Hai Deng currently works at Intel Corporation, where he leverages his expertise to contribute to cutting-edge research and development initiatives. His work supports Intel's mission to lead in semiconductor innovation and maintains the company's competitive edge in a rapidly evolving market.
Collaborations
Throughout his career, Deng has collaborated with notable colleagues, including Huey-Chiang Liou and Hok-Kin Choi. These collaborations have enhanced the research and development process, allowing for the exchange of ideas and the acceleration of technological advancements within the semiconductor industry.
Conclusion
Hai Deng's innovations are reshaping semiconductor manufacturing processes and materials. His contributions through patents illustrate a commitment to advancing technology in a way that meets the needs of modern electronics. As the industry continues to evolve, inventors like Deng play a crucial role in driving progress and enhancing the capabilities of electronic devices.