Guenter Kaltenbrunner

Title: Guenter Kaltenbrunner: A Pioneer in Rapid Thermal Processing

Introduction

Guenter Kaltenbrunner, an inventive spirit based in Baldham, Germany, has made significant contributions to the field of rapid thermal processing with his innovative inventions. With a total of three patents to his name, Kaltenbrunner has developed methods and apparatus that enhance semiconductor manufacturing efficiency.

Latest Patents

Kaltenbrunner's most recent patents include an "Apparatus and method for rapid thermal processing," which presents a closable enclosure specifically designed for the rapid thermal processing of semiconductor wafers. This enclosure is notable for having an enclosed volume that is less than 10 times the volume of the wafer, and it can be closed around the wafer while surrounded by process gas.

Another important invention by Kaltenbrunner is the "Method and apparatus for rapid thermal processing," which introduces a thin visible and near infrared absorbing plate. This plate is strategically placed between the radiation source and the object to be processed in a rapid thermal processing system, aiding in the heating of the object by utilizing near infrared and far infrared radiation. This invention also reduces material and optically induced heating inhomogeneities, making the processing more efficient.

Career Highlights

Throughout his career, Guenter Kaltenbrunner has shown exemplary dedication and ingenuity in his work. He has collaborated with prominent companies such as Steag Ast, where his innovative approaches have driven advancements in rapid thermal processing. His work has not only been influential in industry applications but has also contributed to the overall progress in semiconductor technology.

Collaborations

Kaltenbrunner has had the opportunity to work alongside talented colleagues, including Zsolt Nenyei and Helmut Sommer. These collaborations have likely enriched his research and led to further innovations in the field of thermal processing systems.

Conclusion

Guenter Kaltenbrunner stands out as a testament to creativity and skill in the realm of rapid thermal processing. With his groundbreaking patents and significant contributions, he continues to inspire future developments in semiconductor technology, solidifying his reputation as an influential inventor in the industry.