For the Inventor, By the Inventor

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Kirchheim, Germany

Ast Elektronik Gmbh

USPTO Granted Patents = 5

Forward Citations = 143

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10 inventors (with patents filed for the assignee):

Zsolt Nenyei (4 out of 14 patents)

Heinrich Walk (2 out of 9 patents)

Andreas Tillmann (2 out of 2 patents)

4. Wilfried Lerch (1 out of 13 patents)

5. Helmut Sommer (1 out of 5 patents)

6. Alexander Gschwandtner (1 out of 10 patents)

7. Thomas Knarr (1 out of 5 patents)

8. Helmut Merkle (1 out of 1 patent)

9. Michael Maurer (1 out of 3 patents)

10. Guenter Kaltenbrunner (1 out of 3 patents)

5 patents: Sort by Forward Citations

1. 5837555 - Apparatus and method for rapid thermal processing (1998-11-17),

2. 5727017 - Method and apparatus for determining emissivity of semiconductor material (1998-03-10),

3. 5628564 - Method and apparatus for wavevector selective pyrometry in rapid thermal (1997-05-13),

4. 5580830 - Modified reaction chamber and improved gas flushing method in rapid (1996-12-03),

5. 5359693 - Method and apparatus for a rapid thermal processing of delicate (1994-10-25),

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USPTO Data Jan 1 1976 - Dec 23 2025

5 Patents

#1 in Kirchheim

#5,996 in Germany

Kirchheim, Germany

Ast Elektronik Gmbh

Forward Citations = 143

10 inventors:

Zsolt Nenyei (4 out of 14 patents)

Heinrich Walk (2 out of 9 patents)

Andreas Tillmann (2 out of 2 patents)

4. Wilfried Lerch (1 out of 13 patents)

5. Helmut Sommer (1 out of 5 patents)

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