Andreas Tillmann

Title: Andreas Tillmann: Innovator in Rapid Thermal Processing Technology

Introduction

Andreas Tillmann is a notable inventor based in Ulm, Germany. He has made significant contributions to the field of rapid thermal processing, particularly through his innovative patents. With a total of 2 patents, Tillmann's work focuses on enhancing the efficiency and effectiveness of thermal processing systems.

Latest Patents

Tillmann's latest patents include a "Method and apparatus for wavevector selective pyrometry in rapid thermal processing." This invention involves a method and apparatus for optical pyrometry in a Rapid Thermal Processing (RTP) System. The system utilizes radiation that is partially specularly reflected from surfaces and is incident on the object with a specific angular distribution. The thermal radiation from the object is measured at angles different from where the incident radiation is maximally reflected.

Another significant patent is the "Modified reaction chamber and improved gas flushing method in rapid thermal processing." This invention features a reaction chamber that includes an aperture for the introduction and removal of objects to be processed. The aperture's cross-sectional area is significantly smaller than that of the reaction chamber, and a method of flushing the chamber with a short time laminar flow of flush gas is employed to enhance the throughput of the RTP system.

Career Highlights

Andreas Tillmann is currently associated with Ast Elektronik, where he continues to develop innovative solutions in the field of thermal processing. His expertise and inventions have positioned him as a key figure in advancing RTP technology.

Collaborations

Tillmann has collaborated with notable colleagues, including Zsolt Nenyei and Heinrich Walk. Their combined efforts contribute to the ongoing development of cutting-edge technologies in their field.

Conclusion

Andreas Tillmann's contributions to rapid thermal processing through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for future innovations.