Guanzhong Lu

Title: Guanzhong Lu: Innovator in Semiconductor and Catalyst Technologies

Introduction

Guanzhong Lu is a prominent inventor based in Shanghai, China. He has made significant contributions to the fields of semiconductor cleaning and catalyst preparation. With a total of three patents to his name, Lu's work showcases his innovative approach to solving complex engineering challenges.

Latest Patents

One of Lu's latest patents is an "Apparatus and method for cleaning semiconductor wafers." This invention provides a comprehensive apparatus designed for the effective cleaning of semiconductor wafers. The apparatus includes at least one first tank containing cleaning chemicals for batch cleaning processes, along with one or more second tanks for additional cleaning liquids. It also features single wafer cleaning modules and a series of robots that facilitate the transfer of wafers through the cleaning process. A controller is integrated to manage the operations of the robots, ensuring a seamless cleaning workflow.

Another notable patent is the "Method for preparing monolithic catalyst washcoat." This method outlines a systematic approach to preparing a washcoat on a monolithic carrier. The process involves preparing a coating slurry, pretreating the carrier, applying the slurry through vacuum spraying, and removing excess material via vacuum extraction. The resulting washcoat, which can be applied to various types of monolithic carriers, is characterized by its uniformity, strong adhesion, and excellent repeatability.

Career Highlights

Guanzhong Lu has held positions at esteemed institutions