Company Filing History:
Years Active: 2013-2017
Title: Gregory Stuart: Innovator in Semiconductor Support Systems
Introduction
Gregory Stuart is a notable inventor based in Burnaby, Canada. He has made significant contributions to the field of semiconductor technology, particularly in the area of workpiece support systems. With a total of 2 patents, his innovations have advanced the methods used in heat-treating semiconductor wafers.
Latest Patents
Stuart's latest patents include "Methods and systems for supporting a workpiece and for heat-treating the workpiece" and "Apparatuses and methods for supporting a workpiece such as a semiconductor wafer." These patents describe a support system designed to accommodate thermally-induced motion of the workpiece, allowing for thermal bowing or bending. The system features a support member with a moveable engagement portion that interacts with the workpiece, enabling it to support the workpiece while allowing for necessary thermal movements. Additionally, his apparatus for supporting a semiconductor workpiece includes a heating system that facilitates vertical motion between the outer edge and the center of the workpiece, ensuring effective heat treatment.
Career Highlights
Gregory Stuart is currently employed at Mattson Technology, Inc., where he continues to develop innovative solutions for the semiconductor industry. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Stuart has collaborated with notable colleagues such as David Malcolm Camm and Guillaume Sempere, contributing to a dynamic work environment that fosters innovation and creativity.
Conclusion
Gregory Stuart's contributions to semiconductor technology through his patents and work at Mattson Technology, Inc. highlight his role as a key innovator in the field. His advancements in workpiece support systems are paving the way for improved manufacturing processes in the semiconductor industry.