The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Dec. 19, 2003
David Malcolm Camm, Vancouver, CA;
Guillaume Sempere, Vancouver, CA;
Ljubomir Kaludjercic, Vancouver, CA;
Gregory Stuart, Burnaby, CA;
Mladen Bumbulovic, Vancouver, CA;
Tim Tran, Surrey, CA;
Sergiy Dets, Burnaby, CA;
Tony Komasa, Vancouver, CA;
Marc Rudolph, Vancouver, CA;
Joseph Cibere, Burnaby, CA;
David Malcolm Camm, Vancouver, CA;
Guillaume Sempere, Vancouver, CA;
Ljubomir Kaludjercic, Vancouver, CA;
Gregory Stuart, Burnaby, CA;
Mladen Bumbulovic, Vancouver, CA;
Tim Tran, Surrey, CA;
Sergiy Dets, Burnaby, CA;
Tony Komasa, Vancouver, CA;
Marc Rudolph, Vancouver, CA;
Joseph Cibere, Burnaby, CA;
Mattson Technology, Inc., Fremont, CA (US);
Abstract
Apparatuses and methods for supporting a workpiece such as a semiconductor wafer. A support system is configured to support the workpiece while allowing thermally-induced motion of the workpiece, which may include thermal bowing or thermal bending. The system may include a support member having a moveable engagement portion engageable with the workpiece, the engagement portion being moveable to allow the thermally-induced motion of the workpiece while supporting the workpiece. The moveable engagement portion may include a plurality of moveable engagement portions of a plurality of respective support members, which may be resiliently engageable with the workpiece. The support members may include flexible support members each having an unconstrained portion and a constrained portion, and the moveable engagement portions may include the unconstrained portions. Alternatively, the support members may be rigid and the system may include a plurality of force applicators such as springs in communication with the support members.